An Improved Passivity-based Control of Electrostatic MEMS Device
نویسندگان
چکیده
منابع مشابه
Passivity based Supervisory Control
Cyber Physical Systems (CPS) often have continuous components interconnected with systems described by discrete state space. Examples of such discrete components may be supervisory controllers or components implemented in software. To design large scale CPS in a compositional manner it would be useful to define a notion of passivity for these discrete components as well. As a first step towards...
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In this paper, a robust PID control scheme is proposed for Micro-Electro-Mechanical-Systems (MEMS) optical switches. The proposed approach is designed in a way which solves two challenging and important problems. The first one is successful reference tracking and the second is mitigating the system nonlinearities. The overall system composed of nonlinear MEMS dynamics and the PID controller is ...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2020
ISSN: 2072-666X
DOI: 10.3390/mi11070688